HFSS VIA connection between metal6 and metal5

smartchi

Dear all,

I have a question about the HFSS VIA usage. I hope anyone could teach me. Actually, I use HFSS to synthesize the CMOS inductor and transformer passive model. As you know that there are several substrate layer with different permittivity value. In my case, each metal embedded in each substrate layer. For example, M6 embedded in Sub6 layer and M5 embedded in Sub5 layer. There will be Via5 connected between M6 and M5. I have defined all metal, substrate and via parameters. However, I found that the Via5 does not connect with M6 and M5 after I do the simulation in HFSS (S21 is open). What do I need to set in the HFSS in order to tell it that Via5 is connect with M6 and M5?

Thanks,

smartchi

anyone could teach me?

very very thanks

xie921220

anyone could teach me?

very very thanks

tianle88125

貌似是网格不够，需要手动划分网格